Trade Agreement: CETA/WTO-AGP/CPTPP/CFTA/FTAs with Peru/Colombia/Panama/Korea/UK Tendering Procedures: Generally only one firm has been invited to bid Non-Competitive Procurement Strategy: Exclusive Rights Comprehensive Land Claim Agreement: No Vendor Name and Address:
Carl Zeiss Canada Ltd 45 Valleybrook Drive Toronto Ontario Canada M3B2S6 Nature of Requirements:
Field Emission Scanning Electron Microscope
31184-226307/A Golab,
Lisa Telephone No. - (343) 574-2635
1. Advance Contract Award Notice (ACAN)
An ACAN is a public notice indicating to the supplier community that a department or agency intends to award a contract for goods, services or construction to a pre-identified supplier, thereby allowing other suppliers to signal their interest in bidding, by submitting a statement of capabilities. If no supplier submits a statement of capabilities that meets the requirements set out in the ACAN, on or before the closing date stated in the ACAN, the contracting officer may then proceed with the award to the pre-identified supplier.
2. Definition of the requirement
National Research Council Canada (NRC) has a requirement for a Field Emission Scanning Electron Microscope, including all training, commissioning, hardware and software, accessories and peripherals, cabling and components, and a 1 year warranty including maintenance and support services. As part of the reinvestment of Fabrication Facilities, the NRC requires the GeminiSEM 560 Field Emission Scanning Electron Microscope (FESEM) to facilitate the necessary inspection capacity and capabilities required to support the changing operations of our multi-shift semiconductor foundry.
3. Criteria for assessment of the Statement of Capabilities (Minimum Essential Requirements)
Any interested supplier must demonstrate by way of a statement of capabilities that its product/equipment/system (as appropriate) meets the following requirements:
1. Field Emission Scanning Electron Microscope (FESEM)
- The instrument must have a column and chamber which must rest on an ultra-precise, pneumatic, self-levelling pendulum anti-vibration system not larger than 0.84M x1.2M.
- The instrument must provide flexibility to enable both high resolution work and flexibility to image a wide range of different sample materials including insulating materials, which requires variable pressure imaging, and magnetic or magnetizable material.
- The instrument must have a resolution of 0.5 nm at 15 kV, 0.8 nm at 1 kV and 1.0 nm at 500 V, in High Vacuum Mode.
The resolution must be reached without sample bias in order to enable high resolution imaging of samples or sample geometries, which cannot be used together with sample biasing.
- The instrument must have imaging beam energies down to 20V without sample biasing.
- The instrument must have a resolution of at least 0.7 nm at 1 kV with applied sample bias.
- The instrument must have resolution of 1.4 nm at 3 kV and 1.0 nm at 15 kV at 30 Pa in variable pressure mode.
- The instrument must have a maximum field of view of:
- 1.6mm at 1KV and working distance of 7mm in high resolution mode;
- 5.6 mm at 15 kV and working distance of 8.5 mm in overview mode; and
- 130 mm at max (ca. 50 mm) and working distance of 8.5 mm in overview mode.
- The instrument must have a range of Adjustable Voltage (AV) from 0.02 kV to 30 kV, variable in 10 Volt steps to set-up the AV to any value requested for the various applications, and the voltage setting accuracy must be +/- 10V.
- The instrument must have an ultra-high stable current to allow long-term Energy Dispersive X-ray (EDX), Wavelength Dispersive X-ray
(WDX), and Electron Backscatter Diffraction (EBSD) measurements allowing a beam current of up to 20 nA.
Current stability must not deviate more than 0.2% per hour.
- The instrument must provide the variable pressure (VP) option to reduce the charging effect of insulating materials. The VP range must be from 10 Pa to 60 Pa, adjustable in steps of 1 Pa.
- The instrument must resolve diffusion stop locations and Multiple Quantum Well (MQW) lines without delineation on the same measurement.
- The instrument must have an emission system which must be a Schottky field emission emitter (thermionic) to obtain high brightness, low energy spread combined with the capability to deliver high probe currents. The maximum probe current must be 20 nA.
- The emission system must include an automatic emitter run-up procedure to ensure a safe controlled run-up of the target emitter conditions for longevity of the emitter.
- The emission system must be protected against high currents and include an automatic shut-off to prevent overloads.
- The emission system must have a beam current under high resolution imaging conditions (1kV, 0.8 nm resolution) larger than 20 pA.
- The instrument must have a high performance magnetic lens with an inserted electrostatic lens to decrease spherical and chromatic aberrations with decreasing AV.
- The instrument’s objective lens must provide a reduced magnetic field at specimen surface.
Sub 4 nm resolution imaging of Diamagnetic, Paramagnetic , or Ferromagnetic samples must be possible even at working distances below 2 mm and low AV.
- The instrument must have high resolution imaging of ferromagnetic steel at Working Distance (WD) = 3 mm; AV = 1 kV at 100.000x Mag must be possible.
- The objective lens must have a conical final lens of at least 80° to allow 50° tilt of large specimens at a working distance of 6 mm. The analytical working distance for EDX-analysis with a take-off angle of 35° to be 8.5 mm.
- Imaging with Backscattered Electron (BSE) detector which must be possible simultaneously with EDX at 8.5 mm WD.
- The instruments lens design must allow large fields of view to be observed.
The Mag-range must be from 1*x to 2.000.000x for Scattered Electron (SE) imaging and is Backscattered Electron (BSE) imaging. (*in overview mode for area of interest selection).
- The instruments beam path must be cross-over free to minimize the statistical Coulomb interactions ("Boersch effect") between beam electrons.
- The instrument must have a beam booster within the electron optical column to maintain high energy throughout the entire column.
The beam booster must ensure that the beam must be protected against stray fields, even when the instrument is operated at very low voltages.
- The instrument must have an electromagnetic 7-hole aperture changer incorporated in close proximity to the emitter system.
- The instrument must always be auto-tuned to best resolution with the standard aperture (i.e. 20 µm).
No spot aperture adaptation will be necessary at any AV.
- No limitation regarding image quality may occur if a beam-blanker is mounted in the column.
- The instrument must have a compact column design with integrated Mu-metal shielding to limit sensitivity to stary fields, and to reduce susceptibility to vibrations.
- The column must have a high efficiency in-column Energy Selective Backscattered (EsB) detector system with a filtering grid for the detection of energy backscattered electrons.
- The instruments annular, high efficiency In-lens detector must be integrated in the beam booster located above the objective lens.
The detection material must never show any aging effect.
This detector must provide best SE-resolution.
The acquisition time a noise-free image has to be less than 1 second.
- A lateral Everhart-Thornley SE-detector mounted at the specimen chamber must be provided.
- Mixing of different signals must be possible at any ratio.
Parallel in-lens EsB and in-lens SE detection as well as parallel in-lens SE and chamber SE detection using the Everhart-Thornley detector is required.
- The instrument must have a mounted colour Charged-Coupled Device (CCD) camera with illumination to allow an overview of the internal chamber.
The instrument must allow for the mounting of a second CCD camera.
- The detection system must investigate nonconductive samples without charging effects, and without prior preparation of the sample.
The system must
allow 4 different SE or BSE detectors to be used without any performance limitations during investigation of nonconductive samples.
- The instrument must have a chamber which must allow simultaneously acquisition of all detectors without refocusing.
- The chamber design for analytic must allow all detectors (EXD, WDX, EBSD) to be focused at one short WD allowing simultaneously acquisition at excellent spatial resolution.
WD for analytic must be 8.5 mm.
- The chamber design for analytic must allow for two EDX detectors to be configured coplanar diametrically opposed.
- The chamber must have at least 12 ports.
Three ports for analytic (EDX, WDX).
The remining ports must be Backscatter (BS) detector, Cathodoluminescent (CL) detector, Air lock or EBSD, and an EDX port which must be above the EBSD port and orthogonal to the tilt-axis.
- The chamber must provide two additional ports at the stage door.
- The chamber must allow wafers to be loaded via load-lock by the operator.
- The chamber must allow for wafers to be directly loaded by the operator.
- When the chamber loading is used by the operator, the chamber pump down completion target should be 2 minutes, but must not exceed 5 minutes.
- The instrument must have a high precision fully motorized stage, allowing movements of X = 130 mm, Y = 130 MM, Z - 50 mm, T = -4° to 70°, and R = 360°.
- The instrument must allow for loads specimen up to 179 mm in diameter and allow movement of the sample to full X and Y travel ranges noted above.
- The stage must have an eucentric design and is controlled by a dual joystick interface.
- The stage design must enable a montage of accessories, including but not limited to Peltier cooling device and tensile module.
- The instrument must have a scanning system which must provide 16Bit scan precision and large image storage up to 32k x 24k.
The maximum scan rate must be 25 ns/pixel.
- The instrument must have a High Current/Depth of Field module (HC/DoF), providing parallel beam illumination and automatic tilt correction.
- A requirement for the EBSD application must allow for no visible distortion at 70° with no dynamic focus required.
- The instrument must have a fully automatic controlled vacuum system.
- The chamber vacuum must be pumped by a 250 liter per second turbo molecular pump.
- The instrument must have high vacuum in the chamber which must be better than 2.0 x 10-6 mbar.
- The vacuum system must have a menu to display the high and low vacuum measurements.
- The instrument must have a specimen transfer system accessory which must work in low vacuum mode.
- The instrument must be controlled by a graphical user interface (GUI).
A choice of intuitive and concise GUI must be provided for experienced and novice users with administrator control.
GUI must be designed for multi-user environment and customizable.
A Macro-Editor with access of 250 instrument control functions must be provided.
- The software must allow for user configurable annotation ability on all images. The software must also allow for free entry of user text with any font, and at any position in the image.
The software must have the Microsoft Windows operating fonts and sizes.
All text, font, colour, style and background must be freely and individually selectable.
- The software must allow transfer of images directly, and measured without any recalculation or off-line analysis.
- The software must allow for standard measurements of length and must have an accuracy of +/- 3% at 3 mm WD.
- The software must provide an interface for Python scripting with customizable workflows.
- The instrument must be controlled by a high grade PC having a 64 bit processor, running on Windows 10 LTSC with a flexible and intuitive graphical user interface (GUI).
External communications and networking must be provided as standard.
4. Applicability of the trade agreement(s) to the procurement
This procurement is subject to the following trade agreement(s)
o Canadian Free Trade Agreement (CFTA) o World Trade Organization - Agreement on Government Procurement (WTO-AGP) o Canada-European Union Comprehensive Economic and Trade Agreement (CETA) o Comprehensive and Progressive Agreement for Trans-Pacific Partnership (CPTPP) o Canada-Chile Free Trade Agreement (CCFTA) o Canada-Colombia Free Trade Agreement o Canada-Honduras Free Trade Agreement o Canada-Korea Free Trade Agreement o Canada-Panama Free Trade Agreement o Canada-Peru Free Trade Agreement (CPFTA) o Canada-United Kingdom Trade Continuity Agreement (Canada-UK TCA) o Canada-Ukraine Free Trade Agreement (CUFTA)
5. Justification for the Pre-Identified Supplier
The Gemini Inspection SEM 560 is the only known instrument that meets all of the minimum essential requirements listed in Section 3 above. Carl Zeiss Canada Ltd. is the original equipment manufacturer (OEM) of this instrument, and is the only known supplier that can supply an instrument meeting all of the minimum essential requirements listed in Section 3 above.
6. Government Contracts Regulations Exception(s)
The following exception to the Government Contracts Regulations is invoked for this procurement under subsection 6(d) - "only one person is capable of performing the work".
7. Exclusions and/or Limited Tendering Reasons
The following exclusions and/or limited tendering reasons are invoked under the section of the trade agreements specified:
Canadian Free Trade Agreement (CFTA) - Article 513.1(b)(iii); World Trade Organization - Agreement on Government Procurement (WTO-AGP) - Article XIII 1(b)(iii); Canada-European Union Comprehensive Economic and Trade Agreement (CETA) - Article 19.12.1(b)(iii); Comprehensive and Progressive Agreement for Trans-Pacific Partnership (CPTPP) - Article 15.10.2(b)(iii); Canada-Chile Free Trade Agreement (CCFTA) - Article Kbis-09.1(b); Canada-Colombia Free Trade Agreement - Article 1409.1(b)(iii); Canada-Honduras Free Trade Agreement - Article 17.11.2 (b)(iii); Canada-Korea Free Trade Agreement - defer to WTO-AGP Article XIII 1(b)(iii); Canada-Panama Free Trade Agreement - Article 16.10.1(b)(iii); Canada-Peru Free Trade Agreement (CPFTA) - Article 16.10.1(b)(iii); Canada-United Kingdom Trade Continuity Agreement (Canada-UK TCA) - defer to CETA Article 19.12.1(b)(iii); and Canada-Ukraine Free Trade Agreement (CUFTA) - Article 16.10.1(b)(iii).
8. Delivery date
The instrument must be delivered and installed on or before 8 months from contract award.
9. Name and address of the pre-identified supplier
Carl Zeiss Canada Ltd. 45 Valleybrook Dr. Toronto, Ontario Canada M3B 2S6
10. Suppliers' right to submit a statement of capabilities
Suppliers who consider themselves fully qualified and available to provide the goods, services or construction services described in the ACAN may submit a statement of capabilities in writing to the contact person identified in this notice on or before the closing date of this notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.
11. Closing date for a submission of a statement of capabilities
The closing date and time for accepting statements of capabilities is May 5, 2022 at 2:00 p.m. EST.
12. Inquiries and submission of statements of capabilities
Inquiries and statements of capabilities are to be directed to:
Lisa Golab Supply Specialist Public Services and Procurement Canada Telephone: 343-574-2635 E-mail: lisa.golab@tpsgc-pwgsc.gc.ca
Delivery Date: Above-mentioned
You are hereby notified that the government intends to negotiate with one firm only as identified above. Should you have any questions concerning this requirement, contact the contracting officer identified above.
An Advance Contract Award Notice (ACAN) allows departments and agencies to post a notice, for no less than fifteen (15) calendar days, indicating to the supplier community that it intends to award a good, service or construction contract to a pre-identified contractor. If no other supplier submits, on or before the closing date, a Statement of Capabilities that meets the requirements set out in the ACAN, the contracting authority may then proceed with the award.
However, should a Statement of Capabilities be found to meet the requirements set out in the ACAN, then the contracting authority will proceed to a full tendering process.
Suppliers who consider themselves fully qualified and available to provide the services/goods described herein, may submit a statement of capabilities in writing to the contact person identified in this Notice on or before the closing date of this Notice. The statement of capabilities must clearly demonstrate how the supplier meets the advertised requirements.
The PWGSC file number, the contracting officer's name and the closing date of the ACAN must appear on the outside of the envelope in block letters or, in the case of a facsimile transmission, on the covering page.
The Crown retains the right to negotiate with suppliers on any procurement.
Documents may be submitted in either official language of Canada.
