Notice of Intended Procurement
NAME OF PROCURING ENTITY
The Governing Council of the University of Toronto (the “University”)
CONTACT PERSON AND CONTRACT PERSON COORDINATES
Renee Cheng
215 Huron Street, 3rd Floor
Toronto, ON M5S 1A2
reneeke.cheng@utoronto.ca
PROCUREMENT DOCUMENTS
The procurement documents are available at www.merx.com.
Note that obtaining access to the procurement documents will require prospective suppliers to register and pay a registration fee. Pricing and Payment Terms are available on the MERX website.
DESCRIPTION OF PROCUREMENT
The University is conducting an RFP for Advanced Photolithographic Laser Writer
The Toronto Nanofabrication Center (TNFC) is the University’s central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions. Advanced tools for MEMS and nanophotonics will enable the TNFC to conduct active interdisciplinary research.
The Center intends to acquire an Advanced Photolithographic Laser Writer from a proponent that demonstrates its ability to the supply, implement and provide continued customer service related to the system. This tool will serve the role to complement the TNFC’s existing EBPG5000+ Electron Beam Pattern Generator which has a capability of achieving pattern resolution down to 7 nm. It should offer exceptional performance for resolving micron-sized features, grayscale exposure, as well as the aligned exposure up to 6-inch wafer. It will be installed at TNFC’s new Pratt Cleanroom - a multiuser facility in the University of Toronto and operated only by trained users. Therefore, the operation with high reliability is crucial.
The procurement is anticipated to involve negotiation. An electronic auction is not anticipated.
ADDRESS AND FINAL DATE FOR SUBMISSIONS
Submissions must be submitted electronically at https://utoronto.bonfirehub.ca/ on or before Friday, May 17, 2024 (2:00 PM local time). The submissions will not be opened publicly.
CONDITIONS FOR PARTICIPATION
Proponents should achieve a score of 65% out of the available technical 70 points of total 100 points.
APPLICABLE TRADE AGREEMENTS
This procurement is subject to the following trade agreement(s):
- The Canadian Free Trade Agreement, Chapter Five
- The Comprehensive Economic and Trade Agreement, Chapter 19
- The Ontario-Quebec Trade and Cooperation Agreement, Chapter 9
CONTRACT DETAILS
The term of Agreement is intended to be for a period of one year with optional one year extension.
EVALUATION CRITERIA
The University will base its selection of qualified suppliers on the following criteria:
Schedule D Part 1
Technical Submission Requirements Weight
B.1 Experience and Qualifications 5
B.2 Technical Requirements
B.2.1 Photolithography Capability 32
1) wafer size 4
2) resolution 6
3) reliability 6
4) writing speed 6
5) alignment 6
6) grayscale lithography 4
B.2.2 Software 15
B.2.3 Regulatory and Industry Standards
Compliance 3
B.3 Delivery, Installation and Testing 7
B.4 Training Services 4
B.5 Warranty and Extended Warranty 8
B.6 Optional Value-Adds 1
Schedule D Part 2 Financial Submission 25
Total 100
Optional Demonstration 15
Total incl. Optional Presentation 115
NOTES
Suppliers should note that information contained within this notice is subject to change. Suppliers are encouraged to obtain the procurement documents which contain the most current information. If there is a conflict between the procurement documents and this notice, the procurement documents will take precedence.
